Microsystems & Nanoengineering publishes original research articles and reviews in the latest aspects of Micro and Nano Electro Mechanical Systems (MEMS/NEMS) and nanoengineering relevant to MEMS/NEMS. The journal will cover new design (theory, modelling and simulation), fabrication, characterization, reliability, and applications of devices and systems in micro and nano scales. Nano-engineered MEMS/NEMS will be also within the scope of publication in this journal.